| JEOL
JSM6600F Field Emission Scanning Electron Microscope (FE
SEM)
Scanning Electron Microscopy (SEM) has two
main advantages over the optical microscope: SEM can provide
higher magnification and it has a better depth of field
than the optical microscope. It is therefore a very common
tool for physical analysis.
With shrinking feature and defect sizes, it has become more
difficult for filament-based (Tungsten or LaB6) SEMs to
use very high magnification without charging or damaging
the device with their high beam currents. Field Emission
SEMs, such as the JEOL JSM6600F, are a standard inspection
tool.
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